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A TCAD Framework for Development and Manufacturing

  • D. M. H. Walker
  • J. K. Kibarian
  • Ch. S. Kellen
  • A. J. Strojwas

Abstract

The semiconductor manufacturing engineer is often faced with the problems of process integration, equipment control, parametric yield diagnosis, process centering, worst-case design, and device parameter extraction. These problems require the use of technology CAD (TCAD) tools across a spectrum of speed and accuracy. We have developed a specialized TCAD framework to integrate the required tools and auxiliary software into a system that is convenient for everyday use. The initial work was embodied in the PREDITOR system, and has now evolved into pdFab, a commercial product. In this paper, we will describe the PREDITOR and pdFab systems, and show experimental results of using pdFab on industrial problems.

Keywords

Threshold Voltage Device Characteristic Device Simulation Doping Profile PMOS Transistor 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag/Wien 1993

Authors and Affiliations

  • D. M. H. Walker
    • 1
  • J. K. Kibarian
    • 1
    • 2
  • Ch. S. Kellen
    • 1
  • A. J. Strojwas
    • 1
  1. 1.Dept. of Electrical and Computer EngineeringCarnegie Mellon UniversityPittsburghUSA
  2. 2.PDF SolutionsPittsburghUSA

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