Abstract
Ellipsometric measurements are, like any experiment, subject to various error effects which may distort their results to a more or less critical degree.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 1988 Springer-Verlag/Wien
About this chapter
Cite this chapter
Riedling, K. (1988). Error Effects in Ellipsometric Investigations. In: Ellipsometry for Industrial Applications. Springer, Vienna. https://doi.org/10.1007/978-3-7091-8961-0_3
Download citation
DOI: https://doi.org/10.1007/978-3-7091-8961-0_3
Publisher Name: Springer, Vienna
Print ISBN: 978-3-211-82040-7
Online ISBN: 978-3-7091-8961-0
eBook Packages: Springer Book Archive