Error Effects in Ellipsometric Investigations

  • Karl Riedling


Ellipsometric measurements are, like any experiment, subject to various error effects which may distort their results to a more or less critical degree.


Error Effect Polarizer Azimuth Polarize Incident Light Periodic Noise Native Oxide Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag/Wien 1988

Authors and Affiliations

  • Karl Riedling
    • 1
  1. 1.Institut für Allgemeine Elektrotechnik und ElektronikTechnical University ViennaViennaAustria

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