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Abstract

Ellipsometry is a technique for the contact-less and non-destructive optical characterization of surfaces [1],[2],[3],[4]. It is based on the fact that a monochromatic electromagnetic wave changes its state of polarization if it strikes non-perpendicularly the interface between two dielectric media. In general, any arbitrary monochromatic transversal wave can be considered composed of two orthogonal coherent waves with a fixed phase relation, e.g., of two linearly polarized waves whose electric field vectors lie within two perpendicular planes (Fig. 1). The field vector Eres which results from a vector addition of the two components Ex and Ey lies within a plane if and only if the two constituent waves are in phase, or out of phase by a multiple of π (which corresponds to an inversion of one of them); the resulting wave is linearly polarized in this case (Fig. 1 (a)). Otherwise, the field vector performs a screw-like motion around the direction of its propagation (the z-direction); its projection onto a plane perpendicular to its direction of propagation describes, in general, an ellipse (Fig. 1 (b)). This ellipse degenerates to a line if the phase difference between the two constituent waves is a multiple of π; it becomes a circle if their amplitudes are equal, and the phase difference between them is π/2 (90°).

Keywords

Reflection Coefficient Data Acquisition Time Polarization Ellipse Ellipsometric Measurement Thin Dielectric Film 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag/Wien 1988

Authors and Affiliations

  • Karl Riedling
    • 1
  1. 1.Institut für Allgemeine Elektrotechnik und ElektronikTechnical University ViennaViennaAustria

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