Ion Implantation in the Surface Analysis of Solid Materials

  • W. H. Gries
Conference paper
Part of the Mikrochimica Acta Supplementum book series (MIKROCHIMICA, volume 11)


For surface analysing of solid materials instrumental methods are employed which, using excitation by ion, electron or photon beams, monitor the emission of characteristic ions, electrons and photons from the surface under investigation. The intensity of the measured signal depends on detector efficiency, instrument transmission, sample viewing geometry, angular distribution of the emitted signal and certain sample properties. In most cases the influence of these factors on the measured signal is known only approximately, thus making quantitative analysis possible only by standardisation via standard reference materials (standards for short).


Depth Profile Surface Analysis Collision Cascade Light Impurity Surface Binding Energy 
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Copyright information

© Springer-Verlag 1985

Authors and Affiliations

  • W. H. Gries
    • 1
  1. 1.Forschungsinstitut der Deutschen Bundespost, FTZDarmstadtFederal Republic of Germany

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