Ion Implantation in the Surface Analysis of Solid Materials
For surface analysing of solid materials instrumental methods are employed which, using excitation by ion, electron or photon beams, monitor the emission of characteristic ions, electrons and photons from the surface under investigation. The intensity of the measured signal depends on detector efficiency, instrument transmission, sample viewing geometry, angular distribution of the emitted signal and certain sample properties. In most cases the influence of these factors on the measured signal is known only approximately, thus making quantitative analysis possible only by standardisation via standard reference materials (standards for short).
KeywordsDepth Profile Surface Analysis Collision Cascade Light Impurity Surface Binding Energy
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