Procedures to Optimize the Measuring Methods in the Electron Probe Microanalysis of Low Energy X-Rays

  • W. Rehbach
  • P. Karduck
  • W.-G. Burchard
Conference paper
Part of the Mikrochimica Acta Supplementum book series (MIKROCHIMICA, volume 11)


Electron probe microanalysis of low energy X-rays has gained increasing importance over the last several years. On the one hand the proportion of analyses of boron, carbon, nitrogen and oxygen has increased, and on the other, interest in the use of low accelerating voltages, which reduces the depth of analysis, has grown. Here the utilization of low energy L- and M-lines is indispensable.


Counting Rate Argon Atom Pulse Height Distribution Brass Surface Flow Proportional Counter 
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Copyright information

© Springer-Verlag 1985

Authors and Affiliations

  • W. Rehbach
    • 1
  • P. Karduck
    • 1
  • W.-G. Burchard
    • 1
  1. 1.Gemeinschaftslabor für ElektronenmikroskopieRWTH AachenAachenFederal Republic of Germany

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