Electron Probe Microanalysis of Oxygen and Determination of Oxide Film Thickness Using Gaussian Ф(ρz) Curves

  • P. Willich
  • D. Obertop
Conference paper
Part of the Mikrochimica Acta Supplementum book series (MIKROCHIMICA, volume 11)


Electron microprobe data reduction based on Gaussian Ф(ρz) depth distribution functions1,2was suggested, amongst others, to improve the quantitative determination of light elements in comparison with the conventional ZAF matrix correction. The accuracy of the Gaussian model has been demonstrated for the quantitative analysis of carbon in carbides3,4. A comparable study is now presented for the quantitative determination of oxygen in oxides.


Oxide Film Metal Layer Gaussian Model Original Parameter Mass Absorption Coefficient 
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Copyright information

© Springer-Verlag 1985

Authors and Affiliations

  • P. Willich
    • 1
  • D. Obertop
    • 1
  1. 1.Philips GmbH Forschungslaboratorium HamburgHamburg 54Federal Republic of Germany

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