Experimental Determination of the Depth Distribution of X-Ray Production Ф(ρz) for X-Ray Energies Below 1 keV
The correction procedure for the quantitative electron probe microanalysis assumes knowledge of the X-ray production as a function of depth in the excited material. The absorption correction requires the relative intensity generated in the depth ρz to calculate the differences in absorption of the generated X-radiation between the specimen to be analyzed and the standard (ρ = density). The so-called atomic number correction deals with different backscattering and X-ray generation in the specimen and the standard, and involves knowledge of the total X-ray intensity generated in the target. The absolute depth distribution of X-ray production Ф (ρz) can provide the required information for both the absorption and atomic number corrections.
KeywordsAtomic Number Depth Distribution Vitreous Carbon Primary Electron Energy Mass Depth
Unable to display preview. Download preview PDF.
- 2.J. D. Brown and L. Parobek, Proc. 6th Int. Conf. on X-Ray Optics and Microanalysis, Tokyo, University of Tokyo Press, 1982, p. 163.Google Scholar
- 3.J. D. Brown and L. Parobek, Adv. X-Ray Anal. 16, 198 (1973).Google Scholar
- 7.W. Reuter, s. ref. 2, p. 121.Google Scholar
- 9.S. N. Deming and S. L. Morgan, Anal. Chem. 45, 278A (1973).Google Scholar
- 10.G. Love and V.D.Scott, J. Phys. D. 11, 1369 (1978).Google Scholar
- 11.C. J. Powell, Rev. Mod. Phys. 48, 33 (1976).Google Scholar