Experimental Determination of the Depth Distribution of X-Ray Production Ф(ρz) for X-Ray Energies Below 1 keV

  • P. Karduck
  • W. Rehbach
Conference paper
Part of the Mikrochimica Acta Supplementum book series (MIKROCHIMICA, volume 11)


The correction procedure for the quantitative electron probe microanalysis assumes knowledge of the X-ray production as a function of depth in the excited material. The absorption correction requires the relative intensity generated in the depth ρz to calculate the differences in absorption of the generated X-radiation between the specimen to be analyzed and the standard (ρ = density). The so-called atomic number correction deals with different backscattering and X-ray generation in the specimen and the standard, and involves knowledge of the total X-ray intensity generated in the target. The absolute depth distribution of X-ray production Ф (ρz) can provide the required information for both the absorption and atomic number corrections.


Atomic Number Depth Distribution Vitreous Carbon Primary Electron Energy Mass Depth 
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Copyright information

© Springer-Verlag 1985

Authors and Affiliations

  • P. Karduck
    • 1
  • W. Rehbach
    • 1
  1. 1.Gemeinschaftslabor für ElektronenmikroskopieRWTH AachenAachenFederal Republic of Germany

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