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Internal Quantification of Glow Discharge Optical Spectroscopy-Depth Profiles of Oxide and Nitride Layers on Metals

  • K. H. Koch
  • D. Sommer
  • D. Grunenberg
Conference paper
Part of the Mikrochimica Acta Supplementum book series (MIKROCHIMICA, volume 11)

Abstract

Glow Discharge Optical Spectroscopy (GDOS) turned out to be a nearly matrix effect free method of analysis with a high sensitivity. It has been used to solve many industrial problems. For nearly all elements and wide ranges of concentration linear calibration functions can be obtained. A special field of application of GDOS is surface analysis. Nowadays, the quantification of elements in surface layers of metallic materials and the determination of layer thicknesses are of great interest.

Keywords

Oxide Layer Transition Phase Depth Profile Federal Republic Aluminium Oxide Layer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    K. H. Koch, M. Kretschmer, and D. Grunenberg, Mikrochim. Acta [Wien] 1983 II, 225.Google Scholar
  2. 2.
    K. H. Müller and H. Oechsner, Mikrochim. Acta [Wien], Suppl. 10, 51 (1983).Google Scholar
  3. 3.
    H. H. Andersen, Appl. Phys. 18, 131 (1979).CrossRefGoogle Scholar

Copyright information

© Springer-Verlag 1985

Authors and Affiliations

  • K. H. Koch
    • 1
  • D. Sommer
    • 1
  • D. Grunenberg
    • 1
  1. 1.Chemische LaboratorienHoesch Stahl AGDortmundFederal Republic of Germany

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