Internal Quantification of Glow Discharge Optical Spectroscopy-Depth Profiles of Oxide and Nitride Layers on Metals
Glow Discharge Optical Spectroscopy (GDOS) turned out to be a nearly matrix effect free method of analysis with a high sensitivity. It has been used to solve many industrial problems. For nearly all elements and wide ranges of concentration linear calibration functions can be obtained. A special field of application of GDOS is surface analysis. Nowadays, the quantification of elements in surface layers of metallic materials and the determination of layer thicknesses are of great interest.
KeywordsOxide Layer Transition Phase Depth Profile Federal Republic Aluminium Oxide Layer
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