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A Rapid Comparison of Matrix Corrections in AES and XPS by Means of Computer Programs

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Modern Developments and Applications in Microbeam Analysis

Part of the book series: Mikrochimica Acta Supplement ((MIKROCHIMICA,volume 15))

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Abstract

The principles of qualitative and quantitative surface analysis by Auger electron spectroscopy and x-ray photoelectron spectroscopy are discussed and the various matrix-dependent parameters which influence the emission of Auger electrons and x-ray photoelectrons are described. Programs which have been developed to permit rapid surface analysis by Auger electron spectroscopy and x-ray photoelectron spectroscopy from raw spectral intensities are described. These programs are shown to be important in comparing different calculations for a particular matrix dependent factor. The surface composition of a number of materials have been determined using the programs from Auger electron spectra and x-ray photoelectron spectra.

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Author information

Authors and Affiliations

  1. Carnegie Laboratory of Physics, Department of Applied Physics and Electronic and Mechanical Engineering, University of Dundee, Dundee, DDI 4HN, Scotland, UK

    Alexander G. Fitzgerald

Authors
  1. Alexander G. Fitzgerald
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Editor information

Editors and Affiliations

  1. Centre for Electron Optical Studies, University of Bath, UK

    Glyn Love

  2. Department of Physics and Astronomy, University of Glasgow, UK

    W. A. Patrick Nicholson

  3. Istituto LAMEL, C.N.R., Bologna, Italy

    Aldo Armigliato

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© 1998 Springer-Verlag Wien

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Fitzgerald, A.G. (1998). A Rapid Comparison of Matrix Corrections in AES and XPS by Means of Computer Programs. In: Love, G., Nicholson, W.A.P., Armigliato, A. (eds) Modern Developments and Applications in Microbeam Analysis. Mikrochimica Acta Supplement, vol 15. Springer, Vienna. https://doi.org/10.1007/978-3-7091-7506-4_47

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  • DOI: https://doi.org/10.1007/978-3-7091-7506-4_47

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-211-83106-9

  • Online ISBN: 978-3-7091-7506-4

  • eBook Packages: Springer Book Archive

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