3D Process Simulation Requirements And Tradeoffs From Industrial Perspective

  • Marius Orlowski
Conference paper


This paper discusses the requirements, challenges, tradeoffs, obstacles, economic constraints, and managerial options for three-dimensional process simulation in the context of present and anticipated technology needs.


Process Simulation Device Simulation Corner Region Simulation Capability Contact Configuration 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag/Wien 1995

Authors and Affiliations

  • Marius Orlowski
    • 1
  1. 1.Advanced Products and Development LaboratoryMotorola Inc.AustinUSA

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