3D Process Simulation at IEMN/ISEN

  • B. Baccus
  • S. Bozek
  • V. Senez
  • Z. Z. Wang


This paper addresses the current fields of interest at IEMN/ISSN concerning 3D process simulation. The emphasis is on the diffusion and oxidation steps and the associated issue of 3D mesh generation. For each step, the achievements are presented with special attention to the numerical aspects. In particular, the principles underlying local remeshing are discussed.


Mesh Generation Nitride Layer Oxidation Step Move Boundary Problem Dopant Diffusion 


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Copyright information

© Springer-Verlag/Wien 1995

Authors and Affiliations

  • B. Baccus
    • 1
  • S. Bozek
    • 1
  • V. Senez
    • 1
  • Z. Z. Wang
    • 1
  1. 1.IEMN Département ISENLille CédexFrance

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