3-D Topography Simulation Using Surface Representation and Central Utilities

  • A. R. Neureuther
  • R. H. Wang
  • J. J Helmsen
  • J. F. Sefler
  • E. W. Scheckler
  • R. Gunturi
  • Rex Winterbottom


There are major opportunities for new algorithms and system integration concepts in TCAD systems which can be met by developing centralized utilities. Suitable purpose-built high performance algorithms for surface representation based simulation developed in connection with SAMPLE-3D are described. An exploratory centralized services system called the Berkeley Topography Utilities has been developed for studying the continuum of flexible choices between reusing these purpose-built algorithms and robust general-purpose solid modeling operations. This system links code from SAMPLE-3D, SIMPL, the IBM Geometry Engine serving as -a solid modeler, and a 2-D shock tracker. The BTU organization into hierarchial views, the use of surface direction monotonicity for speed enhancement, and a geometry tagging method for process trace-back are described.


Surface Representation Optical Lithography Solid Extraction Triangulate Surface Polysilicon Layer 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag/Wien 1995

Authors and Affiliations

  • A. R. Neureuther
    • 1
  • R. H. Wang
    • 1
  • J. J Helmsen
    • 1
  • J. F. Sefler
    • 1
  • E. W. Scheckler
    • 1
  • R. Gunturi
    • 1
  • Rex Winterbottom
    • 1
  1. 1.Dept. of Electrical Engineering and Computer SciencesUniversity of CaliforniaBerkeleyUSA

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