Three-Dimensional Topography Simulator: 3D-MULSS and Its Applications

  • Masato Fujinaga
  • Norihiko Kotani


This paper introduces a three-dimensional topography simulator:3D-MULSS and its applications. We focus on the description of the material surface and the surface advancement, and then we present a 3D-MULSS model, with consideration to the probe size of observation, and based on the integration formula of the balance equation. Next, we show the simulation results of the 3D-MULSS: isotropic deposition, Aluminum-sputter deposition, isotropic etching, anisotropic etching, BPSG flow and sequential process steps. These results make the accuracy of the 3D-MULSS clear, and also show that it is possible to stably simulate the sequential process steps.


Material Surface Volume Rate String Model Mask Pattern Probe Size 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag/Wien 1995

Authors and Affiliations

  • Masato Fujinaga
    • 1
  • Norihiko Kotani
    • 1
  1. 1.ULSI LaboratoryMitsubishi Electric CorporationItami, HyogoJapan

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