Derived Boundary Conditions for Viscous Thermal Oxidation Equations in Pressure Potential Form

  • S. Mijalković
  • W. Joppich
Conference paper


Boundary conditions for viscous flow thermal oxidation equations in pressure potential form are derived in a way which is physically consistent and also convenient for practical implementation. A role of the incompressibility constraint on oxide boundary is emphasised. A possibility to employ the standard piece-wise linear finite element or finite volume discretization schemes is justified. Importance and correctness of the derived boundary conditions are practically demonstrated in the simulation of the standard LOCOS process.


Incompressibility Constraint Linear Finite Element Oxide Boundary Derive Boundary Condition Divergence Free Condition 
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Copyright information

© Springer-Verlag/Wien 1998

Authors and Affiliations

  • S. Mijalković
    • 1
  • W. Joppich
    • 2
  1. 1.Faculty of Electronic EngineeringUniversity of NišNišYugoslavia
  2. 2.Institute for Algorithms and Scientific ComputingGMDSankt AugustinGermany

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