Derived Boundary Conditions for Viscous Thermal Oxidation Equations in Pressure Potential Form
Boundary conditions for viscous flow thermal oxidation equations in pressure potential form are derived in a way which is physically consistent and also convenient for practical implementation. A role of the incompressibility constraint on oxide boundary is emphasised. A possibility to employ the standard piece-wise linear finite element or finite volume discretization schemes is justified. Importance and correctness of the derived boundary conditions are practically demonstrated in the simulation of the standard LOCOS process.
KeywordsIncompressibility Constraint Linear Finite Element Oxide Boundary Derive Boundary Condition Divergence Free Condition
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- G. F. Carey, W. B. Richardson, C. D. Reed and B. J. Mulvaney, Circuit, Device and process Simulation - Mathematical and Numerical Aspects, John Wiley & Sons, Chichester, 1995Google Scholar