A Systematic and Physically Based Method of Extracting a Unified Parameter Set for a Point-Defect Diffusion Model

  • Hironori Sakamoto
  • Shigetaka Kumashiro
  • Hiroshi Matsumoto
Conference paper


A systematic and physically based method for extracting of a unified parameter set for a point-defect diffusion model is proposed. A sensitivity matrix analysis is used to construct the sequence of the extraction and to select the data set to be fitted.


Sink Term Unify Parameter Intrinsic Diffusion Short Channel Effect Impurity Cluster 
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Copyright information

© Springer-Verlag/Wien 1998

Authors and Affiliations

  • Hironori Sakamoto
    • 1
  • Shigetaka Kumashiro
    • 1
  • Hiroshi Matsumoto
    • 1
  1. 1.ULSI Device Development LaboratoriesNEC CorporationSagamihara, KanagawaJapan

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