Simulation of AVC Measurements

  • M. Rottinger
  • N. Seifert
  • S. Selberherr
Conference paper


The recently developed Auger Voltage Contrast (AVC) method is an electronic probing technique for rapid delineation of pn-junctions. The simulation of AVC measurements can improve the understanding of the involved physics and facilitate the development of procedures for automatic extraction of the junction position from measurement data. This paper describes the simulation of AVC measurements using a device simulator.


Surface Potential Beam Current Incident Electron Electron Beam Current Doping Distribution 
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Copyright information

© Springer-Verlag/Wien 1998

Authors and Affiliations

  • M. Rottinger
    • 1
  • N. Seifert
    • 2
  • S. Selberherr
    • 1
  1. 1.Institute for MicroelectronicsTU ViennaViennaAustria
  2. 2.Digital SemiconductorHudsonUSA

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