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Modeling of flow and heat transfer in a vertical reactor for the MOCVD of zirconium-based coatings

  • M. Dauelsberg
  • L. Kadinski
  • C. Schmidt
  • C. Allenbach
  • M. Morstein
Conference paper

Abstract

Flow and heat transfer in a vertical reactor used for the MOCVD growth of zirconium based compounds is studied by computational modeling. The verification of computational predictions is done by temperature measurements. Flow regimes are compared with respect to the flow structure and temperature distribution in the reactor. The modeling study results in better understanding of the processes that determine growth rate uniformity and reproducibility.

Keywords

Heat Transfer Inlet Tube Vertical Reactor Heat Transfer Mode Zirconium Nitride 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Springer-Verlag/Wien 1998

Authors and Affiliations

  • M. Dauelsberg
    • 1
  • L. Kadinski
    • 1
  • C. Schmidt
    • 2
  • C. Allenbach
    • 3
  • M. Morstein
    • 3
  1. 1.Institute of Fluid MechanicsUniversity of Erlangen—NürnbergErlangenGermany
  2. 2.Chair of Electronic DevicesUniversity of Erlangen—NürnbergErlangenGermany
  3. 3.Department of MaterialsLaboratory for Surface Science and TechnologyZürichSwitzerland

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