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Analysis of the asymmetric breakdown characteristics of trench isolation structure by using TCAD

  • S. Kumashiro
  • H. Kawaguchi
  • K. Imai
  • H. Matsumoto
Conference paper

Abstract

Experimentally observed asymmetric breakdown characteristics of shallow trench isolation are investigated by using TCAD. Both transient enhanced diffusion of boron and phosphorus and deactivation of phosphorus piled up at the trench bottom are the main causes of the asymmetry. Several techniques which reduce the asymmetry are proposed and their effects are compared by using TCAD.

Keywords

Leak Current Separation Width Implantation Energy Profile Design High Concentration Region 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Springer-Verlag/Wien 1998

Authors and Affiliations

  • S. Kumashiro
    • 1
  • H. Kawaguchi
    • 1
  • K. Imai
    • 1
  • H. Matsumoto
    • 1
  1. 1.ULSI Device Development LaboratoriesNEC CorporationSagamiharaJapan

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