Analysis of the asymmetric breakdown characteristics of trench isolation structure by using TCAD
Experimentally observed asymmetric breakdown characteristics of shallow trench isolation are investigated by using TCAD. Both transient enhanced diffusion of boron and phosphorus and deactivation of phosphorus piled up at the trench bottom are the main causes of the asymmetry. Several techniques which reduce the asymmetry are proposed and their effects are compared by using TCAD.
KeywordsLeak Current Separation Width Implantation Energy Profile Design High Concentration Region
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- H. Sakamoto, S. Kumashiro, M. Hiroi, M. Hane, and H. Matsumoto, “Simulation of reverse short channel effects with a consistent point-defect diffusion model,” SISPAD’97, pp. 137–140, 1997.Google Scholar
- H. Sakamoto and S. Kumashiro, “A new diffusion algorithm during oxidation which can handle both phosphorus pile-up and boron segregation at Si-SiO2 interface,” SISPAD’97, pp. 81–84, 1997.Google Scholar
- S. Kumashiro and M. Sakurai, “Two-dimensional two-carrier general purpose device simulator BIUNAP,” NASECODE IV, pp. 365–371, 1985.Google Scholar