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A Heterogeneous Environment for Computational Prototyping and Simulation Based Design of MEMS Devices

  • N. M. Wilson
  • Z. K. Hsiau
  • R. W. Dutton
  • P. M. Pinsky
Conference paper

Abstract

This paper gives an overview of MEMS simulation and the computational requirements in the field from the prospective of creating realistic geometry based on process simulation. We motivate the needs for such geometry, and discuss in detail one approach to create pseudo 3-D geometry from 2-D process simulation.

Keywords

Process Simulation Solid Modeling Rounded Corner Corner Effect Physical Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. [1]
    SPEEDIE, http://speedie.stanford.edu. MEMCAD, http://www.memcad.com. Shapes, http://www.xox.com. ProPHLEX, http://www.comco.com.Google Scholar
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    K. Wang, H.S. Park, Z. Yu, R.W. Dutton, “3D Solid Modeling of IC Structures Using Simulated Surface Topography,” SISPAD Conference Proceedings, Tokyo, 1996, pp. 131–132Google Scholar
  3. [3]
    J. Jung-Yeul Gill, L.V. Ngo, P.R. Nelson, C.J. Kim, “Elimination of Extra Spring Effect at the Step-Up Anchor of Surface-Micromachined Structure”, J. Microelectromechanical Sys., vol. 7, no. 1, pp. 114–123Google Scholar

Copyright information

© Springer-Verlag/Wien 1998

Authors and Affiliations

  • N. M. Wilson
    • 1
  • Z. K. Hsiau
    • 1
  • R. W. Dutton
    • 1
  • P. M. Pinsky
    • 1
  1. 1.Departments of Electrical and Mechanical Engineering TCAD Group and Division of Mechanics and Computation CISX 332Stanford UniversityStanfordUSA

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