A Heterogeneous Environment for Computational Prototyping and Simulation Based Design of MEMS Devices
This paper gives an overview of MEMS simulation and the computational requirements in the field from the prospective of creating realistic geometry based on process simulation. We motivate the needs for such geometry, and discuss in detail one approach to create pseudo 3-D geometry from 2-D process simulation.
KeywordsProcess Simulation Solid Modeling Rounded Corner Corner Effect Physical Deposition
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