Abstract
This paper illustrates a common mesh implementation for use in both static and moving boundary process simulations. By using a single mesh server to support the different requirements of those two types of process simulations, it eliminates many interfaces between different simulators and simplifies the simulation process flow. Each simulation module only needs to communicate directly with the mesh program through a well defined common procedure interfaces. By providing a persistent and consistent storage of mesh and field data, the mesh server also greatly reduces the possibility of data loss when transported between simulation steps.
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© 1998 Springer-Verlag/Wien
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Chen, T., Yergeau, D.W., Dutton, R.W. (1998). A Common Mesh Implementation for Both Static and Moving Boundary Process Simulations. In: De Meyer, K., Biesemans, S. (eds) Simulation of Semiconductor Processes and Devices 1998. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6827-1_28
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DOI: https://doi.org/10.1007/978-3-7091-6827-1_28
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-7415-9
Online ISBN: 978-3-7091-6827-1
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