Automatic Mesh Refinement for 3D Numerical Simulation of Thermal Diffusion in Silicon
Within the frame of the european PROMPT-II project (esprit project 24038), the fields of interest at IEMN-ISEN are related to the 3D simulation of thermal annealing process steps. In particular, the implementation of a 5-species diffusion model is under developement what emphasises the requirement for a “clever” control of the space and time discretization. This paper presents such an automatic refinement tool based on the computation of an error estimator.
KeywordsError Estimator Dual Problem Discontinuous Galerkin Method Posteriori Error Estimate Error Formula
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