Abstract
Within the frame of the european PROMPT-II project (esprit project 24038), the fields of interest at IEMN-ISEN are related to the 3D simulation of thermal annealing process steps. In particular, the implementation of a 5-species diffusion model is under developement what emphasises the requirement for a “clever” control of the space and time discretization. This paper presents such an automatic refinement tool based on the computation of an error estimator.
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References
S. Bozek & al., “Mesh Generation for 3D Process Simulation and the Moving Boundary Problem”, SISDEP Proceedings, pp. 460–463, Erlangen, September 1995
R. Verfiihrt, “A posteriori error estimates for nonlinear problems. Finite element discretizations of parabolic problems”, INRIA courses, September 1995
K. Eriksson, C. Johnson, “Adaptive finite element methods for parabolic problems IV. Non-linear problems”, SIAM J. Numer. Anal.32, 1729–1749 (1995)
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© 1998 Springer-Verlag/Wien
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Brocard, D., Senez, V., Bozek, S., Herbaux, J., Bossut, R. (1998). Automatic Mesh Refinement for 3D Numerical Simulation of Thermal Diffusion in Silicon. In: De Meyer, K., Biesemans, S. (eds) Simulation of Semiconductor Processes and Devices 1998. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6827-1_27
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DOI: https://doi.org/10.1007/978-3-7091-6827-1_27
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-7415-9
Online ISBN: 978-3-7091-6827-1
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