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Exponential Expansion for Rapid and Accurate Extraction of Interconnect Capacitance

  • Hoan H. Pham
  • Arokia Nathan
Conference paper

Abstract

We report a new approach for efficient computation of capacitance in multi- conductor systems embedded in homogeneous or multiple dielectric media. The technique employs exponential expansion of the Green’s function 1/r for evaluation of the three-dimensional potential and its gradient, enabling rapid and accurate extraction of interconnect capacitance in VLSI and large-area amorphous silicon electronics. Additionally, it can be used for analysis of electrostatic interaction in micro-electro-mechanical systems (MEMS).

Keywords

Memory Requirement Conductor System Gauss Quadrature Maximum Relative Error Exponential Expansion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Springer-Verlag/Wien 1998

Authors and Affiliations

  • Hoan H. Pham
    • 1
  • Arokia Nathan
    • 1
  1. 1.Department of Electrical and Computer EngineeringUniversity of WaterlooWaterlooCanada

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