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TCAD at the SRC

  • R. Goossens
Conference paper

Abstract

The Semiconductor Research Corporation (SRC) is a consortium that manages IC manufacturing related research. The membership consists of IC manufacturing companies, their suppliers, and a number of affliated companies. Most of the research is conducted at US universities. Research partnerships exist with various organizations such as SEMATECH, the National Laboratories, NIST, DARPA, the State of New York. The SRC is presently organized into 7 science areas: (1) Process Integration, Devices, and Structures; (2) Materials and Bulk Processes; (3) Lithography; (4) Design; (5) Packaging; (6) Factory Automation; (7) Environmental Health & Safety. In addition, the SRC is a partner in the Center for Semiconductor Modeling k Simulation with Los Alamos and Sandia National Laboratories.

Keywords

Sandia National Laboratory Science Area Research Partnership Factory Automation Bulk Process 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Springer-Verlag/Wien 1998

Authors and Affiliations

  • R. Goossens
    • 1
  1. 1.M/S E-100National SemiconductorSanta ClaraUSA

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