Models for the Chemo-Physical Reactions at the Sensitive Layer of Semiconductor Gas Sensors and their Application in the Simulation of these Devices
In this paper we consider models for some adsorption effects, the resulting change of the work function at metal-oxide-semiconductor sensitive layers of gas sensors and their implementation in a two dimensional device simulator, which solves the Poisson equation. An example for the application of this simulation program is given with a Suspended Gate Field Effect Transistor.
KeywordsWork Function Adsorbed Particle Adsorption Effect Sensitive Layer Work Function Change
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