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Analysis of Charge Storage in Polysilicon Contacts

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Simulation of Semiconductor Devices and Processes
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Abstract

We present the use of a commercial 2D device simulator, MEDICI [1], to analyze a polysilicon emitter contact. By using a 2-box model we adjust simultaneously the effective recombination velocity and the stored charge in the polysilicon layer.

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References

  1. Technology Modelling Associates, Inc., MEDICI User’s Manual. March 1992

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  2. G. L. Patton et al, 75-GHz f t SiGe-Base Heterojunction Bipolar Transistors, IEEE Electron Device Letters, p 171. 1990

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  3. M. Nanba et al, A 64 GHz Si Bipolar Transistor Using In-Situ Phosphorus Doped Polysilicon Emitter Technology,IEDM Technical Digest, p 443. 1991

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  4. P. Vande Voorde et al, Hybrid Simulation and Sensitivity Analysis for Advanced Bipolar Device Design and Process Developement, B.C.T.M. Technical Digest, p 114. 1990

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  5. L. M. Castañer and S. Sureda, A Compact Charge Ratio Expression for the Emitter Delay of Polysilicon Emitter Bipolar Transistors, IEEE Transactions on Electron Devices, Submitted.

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  6. Z. Yu et al, A Comprehensive Analytical and Numerical Model of Polysilicon Emitter Contacts in Bipolar Transistors,IEEE Transactions on Electron Devices, p 773. 1984

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© 1993 Springer-Verlag Wien

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Bardés, D., Alcubilla, R. (1993). Analysis of Charge Storage in Polysilicon Contacts. In: Selberherr, S., Stippel, H., Strasser, E. (eds) Simulation of Semiconductor Devices and Processes. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6657-4_72

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  • DOI: https://doi.org/10.1007/978-3-7091-6657-4_72

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-7091-7372-5

  • Online ISBN: 978-3-7091-6657-4

  • eBook Packages: Springer Book Archive

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