Abstract
In this paper we present a new 2D finite element compound semiconductor device simulator H2F suited for simulation of the parasitic effects in recess gate MESFETs and HEMTS. Several simulation examples of real devices fabricated in the Nanoelectronics Research Centre at the University of Glasgow illustrates the usefulness of the adopted finite element approach.
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P. H. Ladbroke, A. J. Hill and J. P. Bridge, J. Microwave and Millimeter-Wave Computer-Aided Eng. Vol. 3, pp. 37–60, 1993.
P. C. Chao, P. M. Smit, S. C. Plamaeteer, and J. C. M. Hwang, IEEE Trans. Electron Dev. Vol. ED-32, pp. 1042, 1985.
J.-R. Zhou, and D. K. Ferry, IEEE Trans. Electron Dev. Vol. 39, pp. 473–477, 1992.
I. C. Kizilyalli, M. Artaki, and A. Chandra, IEEE Trans. Electron Dev. Vol. 38, pp. 197–206, 1991.
H.-F. Chau, D. Pavlidis and K. Tomizava, IEEE Trans. Electron Dev. Vol. 38, pp. 213–221, 1991.
N. I. Cameron, G. Hopkins, I. G. Thayne, S. P. Beaumont, C. D. W. Wilkinson, M. Holland, A. H. Keanand and C. R. Stanley, J. Vac Sci. Technol. B9 3538 (1991).
A. Asenov, and E. Stefanov, Proc. ISPPM Varna, pp. 272–285, 1989:
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© 1993 Springer-Verlag Wien
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Asenov, A., Reid, D., Barker, J.R., Cameron, N., Beaumont, S.P. (1993). Finite Element Simulation of Recess Gate MESFETs and HEMTs: The Simulator H2F. In: Selberherr, S., Stippel, H., Strasser, E. (eds) Simulation of Semiconductor Devices and Processes. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6657-4_65
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DOI: https://doi.org/10.1007/978-3-7091-6657-4_65
Publisher Name: Springer, Vienna
Print ISBN: 978-3-7091-7372-5
Online ISBN: 978-3-7091-6657-4
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