Process Optimization in a Production Environment Using Simulation and Taguchi Methods

  • M. McGee
  • A. J. Walton
Conference paper


This paper discusses the use of Taguchi Method in conjunction with process simulation for optimising IC processes in a high volume production environment. The use of orthogonal arrays is presented and two applications detailed.


Control Factor Sheet Resistance Orthogonal Array Taguchi Method Oxide Thickness 


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  1. [1]
    G. Taguchi,em System of Experimental Design: Engineering Methods to Optimize Quality and Minimize Costs, UNIPUB White Plains/ ASI Dearborn, 1987.Google Scholar
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    M.S. Phadke, Quality Engineering using Robust Design, Prentice Hall, London, 1989.Google Scholar
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    Taguchi Methods: Selected Papers on Methodology and Applications, ASI, Dearborn, 1988Google Scholar
  4. [4]
    G. Taguchi, S. Konishi, Taguchi Methods: Orthogonal Arrays and Linear Graphs,ASI, Dearborn, 1987”Google Scholar

Copyright information

© Springer-Verlag Wien 1993

Authors and Affiliations

  • M. McGee
    • 1
  • A. J. Walton
    • 2
  1. 1.Motorola Ltd.East Kilbride, GlasgowUK
  2. 2.Edinburgh Microfabrication Facility, Department of Electrical EngineeringUniversity of EdinburghEdinburghUK

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