Process Flow Representation within the VISTA Framework

  • Ch. Pichler
  • S. Selberherr


The execution of multi-step simulation sequences involving a number of independent simulation tools is taken care of by the VISTA simulation flow control module which allows for the definition of a simulation task by means of the simulation flow description, a representation of the process flow using symbolic names to call simulation tools. Large process flows can be modeled by using predefined sequences, where the calculation results of all intermediate simulation steps remain available for analysis at a later time. Data level integration is based on the PIF data exchange format which is used to create a wafer state description containing all wafer geometry and material data after each simulation step.


Simulation Tool Simulation Step Simulation Sequence Simulation Task Predefined Sequence 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Wien 1993

Authors and Affiliations

  • Ch. Pichler
    • 1
  • S. Selberherr
    • 1
  1. 1.Institute for MicroelectronicsTU ViennaWienAustria

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