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Process Simulation for Nonplanar Structures with the Multigrid Solver LiSS

  • R. Strasser
  • G. Nanz
  • W. Joppich

Abstract

This paper presents the application of LiSS, the 2D multigrid solver for parabolic and elliptic differential equations developed by the GMD, to the simulation of diffusion processes in complex nonplanar structures. A domain-splitting method is presented. The behaviour of different multigrid cycles applied to rectangular and curvilinear grids of a trench structure is investigated.

Keywords

Multigrid Method Coarse Level Multigrid Algorithm Elliptic Differential Equation Nonplanar Structure 
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References

  1. [1]
    Mijalković, S.; An adaptive multigrid algorithm for simulation of diffusion processes in semiconductor device fabrication, Elcctrosoft, Vol. 1, No. 4, pp. 277–290 (1990)Google Scholar
  2. [2]
    Joppich, W.; AIehrgitterverfahren füc Diffusionsprobleme der Prozeßsimulation, PhD-Thesis Universität Bonn (in gerninn)Google Scholar
  3. [3]
    Lonsdale, G.; Stühen K.; The LLSS Paclrage, Gesellschaft für Mathematik and Datenverarbeitung m.b.HGoogle Scholar
  4. [4]
    Hobler, G.; Pichler, P.; Wimmer, K.; Promis 1.5, Technical University Vienna, Institute for MicroelectronicsGoogle Scholar

Copyright information

© Springer-Verlag Wien 1993

Authors and Affiliations

  • R. Strasser
    • 1
  • G. Nanz
    • 1
  • W. Joppich
    • 2
  1. 1.Campus Based Engineering Center ViennaDigital Equipment CorporationWienAustria
  2. 2.Gesellschaft für Mathematik und Datenverarbeitung (GMD)Schloß BirlinghovenGermany

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