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Monte Carlo MOSFET Simulator Including Inversion Layer Quantization

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Simulation of Semiconductor Devices and Processes

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Abstract

A two-dimensional ensemble Monte Carlo Si-n-MOSFET simulator, considering two-dimensional electron gas behaviour in inversion layer, is presented. Description of inversion layer quantization is solved in the new complex way. Standard bulk Monte Carlo transport model is switched to the two-dimensional electron gas model always when electron reaches the quantized region. Electron energy profiles along the MOSFET channel are studied. Comparison with experimental results, measured on the short channel MOSFET test structures is performed.

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References

  1. F. Venturi, E. Sangiorgi, R. Brunetti, W. Quade, C. Jacoboni, B. Rico: Monte Carlo Simulation of High Energy Electrons and Holes in Si-n-MOSFET’s, IEEE Trans. on CAD, vol. 10, pp. 1276–1285, (1991)

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  4. J. Voves: Inversion Layer Quantization in Monte Carlo MOSFET Simulation, 13th G en. Con f.Cond.Matter Div.EPS, Regensburg, (1993)

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  5. J. Voves, J. Veselý: MOSFET Gate Current Modelling Using Monte Carlo Method, ESSDERC 88, pp.791–794, Montpellier, (1988)

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Author information

Authors and Affiliations

  1. Department of Microelectronics, Faculty of Electrical Engineering, The Czech Technical University of Prague, Technickà 2, CS-16627, Praha 6, Czech Republic

    J. Voves

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  1. J. Voves
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Editor information

Editors and Affiliations

  1. Institut für Mikroelektronik, Technische Universität Wien, Austria

    Siegfried Selberherr , Hannes Stippel  & Ernst Strasser ,  & 

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© 1993 Springer-Verlag Wien

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Voves, J. (1993). Monte Carlo MOSFET Simulator Including Inversion Layer Quantization. In: Selberherr, S., Stippel, H., Strasser, E. (eds) Simulation of Semiconductor Devices and Processes. Springer, Vienna. https://doi.org/10.1007/978-3-7091-6657-4_45

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  • DOI: https://doi.org/10.1007/978-3-7091-6657-4_45

  • Publisher Name: Springer, Vienna

  • Print ISBN: 978-3-7091-7372-5

  • Online ISBN: 978-3-7091-6657-4

  • eBook Packages: Springer Book Archive

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