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Quantitative 2D Stress Dependent Oxidation with Viscoelastic Model

  • V. Senez
  • D. Collard
  • B. Baccus

Abstract

For the proper modelling of the stress in two-dimensional local oxidation, oxide and nitride have to be considered as viscoelastic materials. This paper presents an original calibration of the viscoelastic model. It is based on the effect of stresses on the grown oxide thickness.

Keywords

Oxide Thickness Viscoelastic Model IEDM Tech Original Calibration Inverse Radius 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 1993

Authors and Affiliations

  • V. Senez
    • 1
  • D. Collard
    • 1
  • B. Baccus
    • 1
  1. 1.IEMN-ISENLille CédexFrance

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