Quantitative 2D Stress Dependent Oxidation with Viscoelastic Model

  • V. Senez
  • D. Collard
  • B. Baccus


For the proper modelling of the stress in two-dimensional local oxidation, oxide and nitride have to be considered as viscoelastic materials. This paper presents an original calibration of the viscoelastic model. It is based on the effect of stresses on the grown oxide thickness.


Oxide Thickness Viscoelastic Model IEDM Tech Original Calibration Inverse Radius 
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Copyright information

© Springer-Verlag Wien 1993

Authors and Affiliations

  • V. Senez
    • 1
  • D. Collard
    • 1
  • B. Baccus
    • 1
  1. 1.IEMN-ISENLille CédexFrance

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