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Grid and Geometry Techniques for Multi-Layer Process Simulation

  • Z. H. Sahul
  • R. W. Dutton
  • M. Noell

Abstract

A robust grid generation and evolution technique for process simulation is presented. A quadtree approach is used to decimate the geometry and final triangulation is performed using templates. Warping is used to improve the grid quality near boundaries. The quadtree depends only on the structure’s spatial extent and not on the specific vertices. This allows independent manipulation of the geometry and grid by various process simulation tools.

Keywords

Aspect Ratio Quadrilateral Mesh Vertex Point Specific Vertex Initial Grid 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. [1]
    R. Bank, PLTMG User’s Guide - Edition 5.0, Technical Report. Dept. of Mathematics, U.C. San Diego, 1988Google Scholar
  2. [2]
    M. Bern, et. al. Provably Good Mesh Generation. Proc. 31st IEEE Symp. Foundations of Computer Science (1990) 231–241.Google Scholar
  3. [3]
    J. McVittie, et. al. SPEEDIE User’s Manual Version 2.0. Integrated Circuits Laboratory. Stanford University. Feb. 1992Google Scholar

Copyright information

© Springer-Verlag Wien 1993

Authors and Affiliations

  • Z. H. Sahul
    • 1
  • R. W. Dutton
    • 1
  • M. Noell
    • 2
  1. 1.Integrated Circuits LaboratoryStanford UniversityStanfordUSA
  2. 2.Motorola IncAustinUSA

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