T2CAD: Total Design for Sub-um Process and Device Optimization with Technology-CAD
“T2CAD (Total-Technology-CAD)” is proposed as an application technology of process & device simulators, which provides useful and important data for VLSI process design and optimization. It includes (1) reliability & accuracy of TCAD simulations and (2) process and device optimization method with TCAD, as well as (3) application methodology to VLSI chip design. A sub-um CMOS technology for Mega-bit DRAMs has been optimized based on T2CAD.
KeywordsDrain Current Dynamic Random Access Memory Total Design Device Optimization Gate Oxide Thickness
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