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An Improved Calibration Methodology for Modeling Advanced Isolation Technologies

  • Peter Smeys
  • Peter B. Griffin
  • Krishna C. Saraswat

Abstract

An improved calibration methodology for simulating advanced isolation technologies using SUPREM-IV is presented. Based on the experimental determination of the material properties of silicon nitride, an improved parameter set for the stress dependent oxidation models is derived. The calculated substrate stress using this new parameter set is compared with micro-raman spectroscopy stress measurements to validate the calibration methodology.

Keywords

Silicon Nitride Boundary Shape Silicon Nitride Film Calibration Methodology Isolation Structure 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • Peter Smeys
    • 1
  • Peter B. Griffin
    • 1
  • Krishna C. Saraswat
    • 1
  1. 1.Department of Electrical EngineeringStanford UniversityStanfordUSA

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