Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor
Advances in development of mathematical models and numerial techniques for modelling of MOCVD in the Planetary Reactor™ are presented. Importance of coupled flow and mass transport calculations, accurate modelling of radiative heat transfer and complex chemical interactions is discussed. Advantages and disadvantages of block-structured and unstructured grid algorithms are considered.
KeywordsRadiative Heat Transfer Unstructured Grid Ceiling Temperature Growth Rate Distribution Quartz Wall
Unable to display preview. Download preview PDF.