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Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor

  • T. Bergunde
  • M. Dauelsberg
  • Yu. Egorov
  • L. Kadinski
  • Yu. N. Makarov
  • M. Schäfer
  • G. Strauch
  • M. Weyers
Conference paper

Abstract

Advances in development of mathematical models and numerial techniques for modelling of MOCVD in the Planetary Reactor™ are presented. Importance of coupled flow and mass transport calculations, accurate modelling of radiative heat transfer and complex chemical interactions is discussed. Advantages and disadvantages of block-structured and unstructured grid algorithms are considered.

Keywords

Radiative Heat Transfer Unstructured Grid Ceiling Temperature Growth Rate Distribution Quartz Wall 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • T. Bergunde
    • 1
  • M. Dauelsberg
    • 2
  • Yu. Egorov
    • 4
  • L. Kadinski
    • 2
  • Yu. N. Makarov
    • 2
  • M. Schäfer
    • 2
  • G. Strauch
    • 3
  • M. Weyers
    • 1
  1. 1.Ferdinand-Braun-Institut für HöchstfrequenztechnikBerlinGermany
  2. 2.Lehrstuhl für StrömungsmechanikUniversität Erlangen-NürnbergErlangenGermany
  3. 3.AIXTRON GmbHAachenGermany
  4. 4.Advanced Technology CenterSt. PetersburgRussia

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