Quasi Three-Dimensional Simulation of Heat Transport in Thermal-Based Microsensors

  • A. Nathan
  • N. R. Swart


Results based on quasi three-dimensional numerical solutions of electrothermal behaviour in thermally isolated microstructures are presented. Here, we solved the two-dimensional system of electrothermal equations with heat loss to the surrounding (due to natural convection) incorporated as a mixed boundary condition. The convective heat loss was calculated based on a three-dimensional solution to the heat conduction equation using a boundary element method. The technique, employed in the analysis of heat transfer in a µ-Pirani gauge, yields numerical soultions which provide good agreement with measurement data.


Natural Convection Heat Transport Boundary Element Method Mixed Boundary Condition Convective Heat Loss 
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  1. [1]
    R.G. Johnson and R.E. Higashi, Sensors and Actuators, vol. 11 (1987) 63.MATHCrossRefGoogle Scholar
  2. [2]
    A.W. van Herwaarden and P.M. Sarro, J. Vac. Sci. Tech., vol. A5 (1987) 2454.Google Scholar
  3. [3]
    J.S. Suehle, R.E. Cavicchi, M. Gaitan, and S. Semancik, IEEE Electron Dev. Letts., vol. 14 (1993) 118.CrossRefGoogle Scholar
  4. [4]
    N.R. Swart and A. Nathan, Tech. Digest, IEEE IEDM, 1994, p. 135.Google Scholar
  5. [5]
    N.R. Swart, Heat Transport in Thermal-Based Microsensors, Ph.D. dissertation, University of Waterloo, 1994.Google Scholar
  6. [6]
    K. Nabors and J. White, IEEE Trans. CAD, vol. 10 (1991) 1447.Google Scholar
  7. [7]
    W. Allegretto, B. Shen, Z. Lai, and A.M. Robinson, Sensors and Materials, vol. 6 (1994) 71.Google Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • A. Nathan
    • 1
  • N. R. Swart
    • 2
  1. 1.Electrical and Computer EngineeringUniversity of WaterlooWaterlooCanada
  2. 2.Institut National d’OptiqueSainte-FoyCanada

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