Quasi Three-Dimensional Simulation of Heat Transport in Thermal-Based Microsensors
Results based on quasi three-dimensional numerical solutions of electrothermal behaviour in thermally isolated microstructures are presented. Here, we solved the two-dimensional system of electrothermal equations with heat loss to the surrounding (due to natural convection) incorporated as a mixed boundary condition. The convective heat loss was calculated based on a three-dimensional solution to the heat conduction equation using a boundary element method. The technique, employed in the analysis of heat transfer in a µ-Pirani gauge, yields numerical soultions which provide good agreement with measurement data.
KeywordsNatural Convection Heat Transport Boundary Element Method Mixed Boundary Condition Convective Heat Loss
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