2-D Adaptive Simulation of Dopant Implantation and Diffusion
This paper describes the techniques for adaptive grid generation for dopant implantation and diffusion in process simulation.
KeywordsPosteriori Error Posteriori Error Estimation Adaptive Grid Junction Depth Local Refinement
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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© Springer-Verlag Wien 1995