2-D Adaptive Simulation of Dopant Implantation and Diffusion

  • Chih-Chuan Lin
  • Mark E. Law


This paper describes the techniques for adaptive grid generation for dopant implantation and diffusion in process simulation.


Posteriori Error Posteriori Error Estimation Adaptive Grid Junction Depth Local Refinement 
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Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • Chih-Chuan Lin
    • 1
  • Mark E. Law
    • 1
  1. 1.Department of Electrical EngineeringUniversity of FloridaGainesvilleUSA

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