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Efficient 3D Unstructured Grid Algorithms for Modelling of Chemical Vapour Deposition in Horizontal Reactors

  • F. Durst
  • A. O. Galjukov
  • Yu. N. Makarov
  • M. Schäfer
  • P. A. Voinovich
  • A. I. Zhmakin
Conference paper

Abstract

The paper deals with the use of 3D unstructured grid algorithms with adaptive local grid refinement for the computation of flow, heat and mass transfer and their application to the modelling of metalorganic chemical vapor deposition (MOCVD) of epitaxial layers of GaAs and GaN. It is shown that this approach is promising for an accurate 3D modelling of the deposition processes.

Keywords

Froude Number Memory Requirement Grid Refinement Horizontal Reactor Growth Rate Distribution 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • F. Durst
    • 1
  • A. O. Galjukov
    • 2
  • Yu. N. Makarov
    • 1
  • M. Schäfer
    • 1
  • P. A. Voinovich
    • 2
  • A. I. Zhmakin
    • 3
  1. 1.Lehrstuhl für StrömungsmechanikUniversität Erlangen-NürnbergErlangenGermany
  2. 2.Advanced Technology CenterSt.PetersburgRussia
  3. 3.Numerical Simulation Department, A. F. Ioffe Physical Technical InstituteRussian Academy of SciencesSt. PetersburgRussia

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