Application of the Two-dimensional Numerical Simulation for the Description of Semiconductor Gas Sensors
The implementation of models for the gas adsorption on metal-oxide-semiconductors in a two-dimensional device simulator is the subject of this paper. Further we give an application example for the simulation of the sensitive reactions and the electronic device in their exchange. For that we use a conductivity type gas sensor with a polycrystalline ZnO active layer.
KeywordsSpace Charge Region Current Density Distribution Sensitive Layer Work Function Change Strong Chemosorption
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