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The Role of SEMATECH in Enabling Global TCAD Collaboration

  • E. M. Buturla
  • J. Byers
  • A. Husain
  • M. Kump
  • P. Lloyd
  • R. Manukonda
  • S. Runnels
  • D. Scharfetter
Conference paper

Abstract

SEMATECH is a consortium of United States semiconductor manufacturers conducting precompetitive research and development for semiconductor manufacturing. This paper discusses the efforts of the Technology Computer Aided Design (TCAD) group at SEMATECH to create and foster international cooperation in a number of precompetitive TCAD-related areas. In addition, the paper addresses techniques for information exchange and the need for TCAD standards.

Keywords

Semiconductor Manufacturing Member Company Compact Model Impurity Profile Profile Exchange 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • E. M. Buturla
    • 1
  • J. Byers
    • 1
  • A. Husain
    • 1
  • M. Kump
    • 1
  • P. Lloyd
    • 1
  • R. Manukonda
    • 1
  • S. Runnels
    • 1
  • D. Scharfetter
    • 1
  1. 1.Technology Computer Aided DesignSEMATECHAustinUSA

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