The Role of SEMATECH in Enabling Global TCAD Collaboration
SEMATECH is a consortium of United States semiconductor manufacturers conducting precompetitive research and development for semiconductor manufacturing. This paper discusses the efforts of the Technology Computer Aided Design (TCAD) group at SEMATECH to create and foster international cooperation in a number of precompetitive TCAD-related areas. In addition, the paper addresses techniques for information exchange and the need for TCAD standards.
KeywordsSemiconductor Manufacturing Member Company Compact Model Impurity Profile Profile Exchange
Unable to display preview. Download preview PDF.