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Multidimensional Nonlinear Viscoelastic Oxidation Modeling

  • Stephen Cea
  • Mark Law

Abstract

This paper describes the oxidation module for the process simulator FLOOPS. Simulation results for silicon oxidation in two and three dimensions are demonstrated.

Keywords

Residual Stress Dimensional Simulation Nonlinear Iteration Velocity Relaxation Silicon Oxidation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    J. P. Peng et al., COMPEL, p. 341, 1991.Google Scholar
  2. 2.
    V. Senez et al., SISDEP Tech. Digest, p. 165, 1993.Google Scholar
  3. 3.
    D.B. Kao et al., IEEE Trans. on Electron Devices, p. 25, 1988.Google Scholar
  4. 4.
    P. Sutardja et al., IEEE Trans. on Electron Devices, p. 2415, 1989.Google Scholar
  5. 5.
    H. Umimoto et al., IEEE Trans. Comp. Aided Design, p. 599, 1990.Google Scholar
  6. 6.
    D. Collard et al., NUPAD IV Proceedings, p. 21, 1992.Google Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • Stephen Cea
    • 1
  • Mark Law
    • 1
  1. 1.Dept. of Electrical EngineeringUniversity of FloridaGainesvilleUSA

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