Multidimensional Nonlinear Viscoelastic Oxidation Modeling
This paper describes the oxidation module for the process simulator FLOOPS. Simulation results for silicon oxidation in two and three dimensions are demonstrated.
KeywordsResidual Stress Dimensional Simulation Nonlinear Iteration Velocity Relaxation Silicon Oxidation
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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