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Viscoelastic Modeling of Titanium Silicidation

  • Stephen Cea
  • Mark Law

Abstract

This paper describes titanium silicidation modeling using the process simulator FLOOPS. Erpimental work shows that viscoelastic models are required to fit the observed behavior. The capability to simulate a wide range of silicide examples are shown, but more experimental evidence is needed to calibrate the models.

Keywords

Stress Relaxation Poly Silicon Titanium Nitride Elastic Element Viscoelastic Model 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • Stephen Cea
    • 1
  • Mark Law
    • 1
  1. 1.Department of Electrical EngineeringUniversity of FloridaGainevilleUSA

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