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2-D MOSFET Simulation by Self-Consistent Solution of the Boltzmann and Poisson Equations Using a Generalized Spherical Harmonic Expansion

  • W.-C. Liang
  • Y-J. Wu
  • K. Hennacy
  • S. Singh
  • N. Goldsman
  • I. Mayergoyz
Conference paper

Abstract

MOSFET simulation is performed by direct self-consistent solution of the Boltzmann, Poisson and Hole Continuity equations. To formulate the Boltzmann equation, a spherical harmonic approach has been developed which allows for expansion to arbitrarily high order. The self-consistent 2-dimensional MOSFET simulations incorporated four spherical harmonics. Simulation results provide the distribution function for the entire device, as well as substrate current, and average quantities including electron temperature, average velocity, and carrier concentration.

Keywords

Boltzmann Transport Equation Substrate Current Entire Device Momentum Distribution Function Spherical Harmonic Basis 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. [1]
    H. Lin, N. Goldsman, and I. D. Mayergoyz, “Device Modeling by Deterministic Self-Consistent Solution of Poisson and Boltzmann Transport Equations, ”Solid-State Electronics, vol. 35, no. 6, pp. 769–778, 1992.CrossRefGoogle Scholar
  2. [2]
    K. Hennacy, Spherical Harmonic and Effective Field Formulations of Boltzmann’s Transport Equation: Case Studies in Silicon. PhD thesis, University of Maryland, 1994.Google Scholar
  3. [3]
    A. Gnudi, D. Ventura, G. Baccarani, and F. Odeh, “Two-Dimensional MOSFET Simulation by means of a Multidemensional Spherical Harmonics Expansion of the Boltzmann Transport Equation, ”Solid-State Electronics, vol. 36, p. 575, 1993.CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • W.-C. Liang
    • 1
  • Y-J. Wu
    • 1
  • K. Hennacy
    • 1
  • S. Singh
    • 1
  • N. Goldsman
    • 1
  • I. Mayergoyz
    • 1
  1. 1.Department of Electrical EngineeringUniversity of MarylandCollege ParkUSA

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