Fast and Accurate Aerial Imaging Simulation for Layout Printability Optimization

  • V. Axelrad
Conference paper


Optical lithography has been a major force in the continuing reduction of feature size in VLSI. Pushing the limits of lithography by using advanced lenses (high NA, in-lens filtering, etc.), light sources (annular, etc.) and mask designs (phase shift masks, optical proximity corrections, etc.) allowed to extend its life span far beyond what was predicted only 10 years ago.


Aerial Image Fast Fourier Transform Algorithm Mask Image Optical Lithography Regular Layout 


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  1. [1]
    O.W. Otto, J.G. Garofalo, K.K. Low, C.-M. Yuan, R.C. Henderson, C. Pierrat, R.L. Kostellak, S. Vaidya, P.K. Vasudev, “Automated Optical Proximity Correction — A Rules-Based Approach”, SPIE Vol. 2197, 1994Google Scholar
  2. [2]
    Technology Modeling Associates, DEPICT User Manual, 1994Google Scholar
  3. [3]
    UC Berkeley, SPLATGoogle Scholar
  4. [4]
    H. Fleischer and V. Axelrad, “Fourier-Acoustics: An Approach to Acoustic Field Analysis”, Acustica, vol. 57, 1985Google Scholar
  5. [5]
    H. Fleischer and V. Axelrad, “Restoring an Acoustic Source from Pressure Data Using Wiener Filtering”, Acustica, vol. 60, 1986Google Scholar
  6. [6]
    C. Spence, J. Nistler, E. Barouch, U. Hollerbach and S. Orszag, “Automated Determination of CAD Layout Failures Through Focus: Experiment and Simulation”, SPIE Vol. 2197, 1994Google Scholar
  7. [7]
    N. Shiraishi, S. Hirukawa, Y. Takeuchi and N. Magome, Proc. SPIE 1674, p. 741, 1992CrossRefGoogle Scholar
  8. [8]
    D.C. Cole, E. Barouch, U. Hollerbach, S.A. Orszag, “Derivation and Simulation of Higher Numerical Aperture Scalar Aerial Images”, Jpn. J. Appl. Phys., Vol. 31, Pt. 1, No. 12B, 1992Google Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • V. Axelrad
    • 1
  1. 1.Technology Modeling AssociatesPalo AltoUSA

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