TCAD Optimization Based on Task-Level Framework Services
This paper presents the integration of an external optimizer into the VISTA TCAD framework. A collection of task-level framework services is used by the optimizer to request the execution of process flow and device simulation tasks. All aspects of tool control and simulation data management are taken care of by these services, allowing for an easy implementation of a variety of task-level applications such as sensitivity analysis tasks, optimization, and RSM extraction. An example shows the calibration of MINIMOS’ mobility parameters.
KeywordsProcess Flow Response Surface Model Gate Length Optimization Task Service Layer
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