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A Programmable Tool for Interactive Wafer-State Level Data Processing

  • G. Rieger
  • S. Halama
  • S. Selberherr
Conference paper

Abstract

This paper presents a tool for initial and intermediate data processing at waferstate level. Geometric operations and analytical attribute calculations are combined with the graphical user interface and with some TCAD shell functionality to reduce the effort of both manual editing and automated operations within complex simulation flows.

Keywords

Graphical User Interface Grid Generator Manual Editing Programmable Tool Extension Language 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    A.V. Aho, R. Sethi, and J.D. Ullmann, Compilers, Addison-Wesley, 1986.Google Scholar
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    R.E. Bank, ”PLTMG: A Software Package for Solving Elliptic Partial Differential Equations”, Frontiers in Applied Mathematics, vol. 15, SIAM, 1994.Google Scholar
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    F. Fasching, W. Tuppa, and S. Selberherr, ”VISTA-The Data Level”, IEEE Trans. Computer-Aided Design, vol. 13(1), pp. 72–81, 1994.CrossRefGoogle Scholar
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    S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, Ch. Pichler, H. Pim-ingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stip-pel, E. Strasser, W. Tuppa, K. Wimmer, and S. Selberherr, ”The Viennese Integrated System for Technology CAD Applications”, In F. Fasching, S. Halama, and S. Selberherr, editors, Technology CAD Systems, pp. 197–236, Springer, 1993.Google Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • G. Rieger
    • 1
  • S. Halama
    • 1
  • S. Selberherr
    • 1
  1. 1.Institute for MicroelectronicsTU ViennaViennaAustria

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