Statistical Accuracy and CPU Time Characteristic of Three Trajectory Split Methods for Monte Carlo Simulation of Ion Implantation
Three trajectory split methods  for the acceleration of two and three-dimensional Monte Carlo simulation of ion implantation into crystalline targets are presented. They ensure a much better statistical representation in regions with a dopant concentration several orders of magnitudes smaller than the maximum. As a result the time required to perform a simulation with comparable statistical accuracy is drastically reduced. The advantages of the new approaches have been confirmed by a thorough statistical analysis.
KeywordsStatistical Accuracy Split Method Split Point Collision Cascade Implantation Damage
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