A New Hydrodynamic Equation for Ion-Implantation Simulation

  • Shiroo Kamohara
  • Megumi Kawakami
Conference paper


In this paper, we propose a new hydrodynamic equation that reduces the simulation CPU time of the ion implantation to the complicated multi-layer structures. To simplify introduction of the hydrodynamic equation we introduced a BTE that includes the Fokker-Planch collision term and transformed this BTE into a hierarchical structure by moment expansion. We successfully shortened the CPU time by a factor of more than 100.


Hydrodynamic Equation Electronic Collision Boltzmann Transport Equation Collision Problem Moment Expansion 
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Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • Shiroo Kamohara
    • 1
  • Megumi Kawakami
    • 1
  1. 1.Semiconductor Development CenterSemiconductor & Integrated Circuit Div., Hitachi, Ltd.TokyoJapan

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