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A New Hydrodynamic Equation for Ion-Implantation Simulation

  • Shiroo Kamohara
  • Megumi Kawakami
Conference paper

Abstract

In this paper, we propose a new hydrodynamic equation that reduces the simulation CPU time of the ion implantation to the complicated multi-layer structures. To simplify introduction of the hydrodynamic equation we introduced a BTE that includes the Fokker-Planch collision term and transformed this BTE into a hierarchical structure by moment expansion. We successfully shortened the CPU time by a factor of more than 100.

Keywords

Hydrodynamic Equation Electronic Collision Boltzmann Transport Equation Collision Problem Moment Expansion 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • Shiroo Kamohara
    • 1
  • Megumi Kawakami
    • 1
  1. 1.Semiconductor Development CenterSemiconductor & Integrated Circuit Div., Hitachi, Ltd.TokyoJapan

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