Advertisement

Three-Dimensional Grid Adaptation Using a Mixed-Element Decomposition Method

  • E. Leitner
  • S. Selberherr

Abstract

A new method for adaptive refinement of unstructured grids has been developed. This method ensures preservation of the element quality and the structural anisotropies of the initial grid. The flexibility of unstructured grids in combination with the implemented error estimation provides a powerful basis for three-dimensional simulation of time dependent processes.

Keywords

Incompatible Element Unstructured Grid Parent Element Structural Anisotropy Grid Density 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. [1]
    N. Hitschfeld and W. Fichtner, “3D Grid Generation for Semiconductor Devices Using a Fully Flexible Refinement Approach”, In S. Selberherr, H. Stippel, and E. Strasser, editors, Simulation of Semiconductor Devices and Processes, pages 413–416. Springer-Verlag Wien New York, September 1993.CrossRefGoogle Scholar
  2. [2]
    R. E. Bank, PLTMG: A Software Package for Solving Elliptic Partial Differential, SIAM, Philadelphia, 1990.Google Scholar
  3. [3]
    O. C. Zienkiewicz, The Finite Element Method, McGraw-Hill, 1989.Google Scholar
  4. [4]
    W. Bohmayr and S. Selberherr, “Trajectory Split Method for Monte Carlo Simulation of Ion Implantation Demonstrated by Three-Dimensional Poly-Buffered LOCOS Field Oxide Corners”, In Int.Symposium on VLSI Technology, Systems, and Applications, Taipei, 1995.Google Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • E. Leitner
    • 1
  • S. Selberherr
    • 1
  1. 1.Institute for MicroelectronicsTU ViennaViennaAustria

Personalised recommendations