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Mesh Generation for 3D Process Simulation and the Moving Boundary Problem

  • S. Bozek
  • B. Baccus
  • V. Senez
  • Z. Z. Wang

Abstract

This paper presents the concepts of a mesh generation technique for 3D process simulation involving structure deformation. One of the main problems is the displacement of boundaries leading to a (complete) remeshing of the structure, large cpu times and complexity of the algorithms. Our approach, based on Delaunay criterion, tetrahedral elements and triangular faces, allows local remeshings of the structure.

Keywords

Mesh Generation Convex Polyhedron Move Boundary Problem Node Insertion Tetrahedral Mesh Generation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    M.E. Law, “Grid generation for three-dimensional non-rectangular semiconductor devices”, In Proc. of SISDEP 5 Conf., pp. 1–8, 1993.Google Scholar
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    N. Hitschfeld, Challenges to Achieving Accurate Three-Dimensional Process Simulation, PhD thesis, ETH Zurich, 1993. Published by Hartung-Gorre Verlag, Konstanz, Germany.Google Scholar
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    P.L. George, F. Hermeline, “Delaunay’s mesh of a convex polyhedron in dimension d. Application to arbitrary polyhedra”, Int. J. Num. Meth. Eng., vol. 33, pp. 975–995, 1992.MathSciNetMATHCrossRefGoogle Scholar
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    P.L. George, F. Hecht, and E. Saltel, “Automatic 3D mesh generation with prescribed meshed boundaries”, IEEE Trans. Magn., vol. 26, no. 2, pp 771–774, 1990.CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Wien 1995

Authors and Affiliations

  • S. Bozek
    • 1
  • B. Baccus
    • 1
  • V. Senez
    • 1
  • Z. Z. Wang
    • 1
  1. 1.IEMN Département ISENLille CedexFrance

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